The SMARTTM Process for Directed Block Co-Polymer Self-Assembly
نویسندگان
چکیده
منابع مشابه
Directed Self-Assembly of Block Copolymer, No1
/Description The PS-rich and neutral PS-b-PMMA block copolymer (BCP) films were spin coated on the neutral random copolymer hydroxyl-terminated PS-r-PMMA layers grafted on the native oxide and 50 nm thick PECVD amorphous silicon oxide layers. Relationship between the grafting density of BCP and surface density of hydroxyl moiety on silicon oxide is discussed. Furthermore, optimization of anneal...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2013
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.26.573